These MEMS sensors have a capability to characterize picoliter volumes of different reagents for various properties. These sensors are used as consumables in Picomeasure PM3.
Unlike a cantilever, these MEMS sensors are clamped on their both ends. They are also under tension which makes them vibrate at higher resonance frequency therefore, these sensors exhibit higher sensitivity towards application such as mass loading of small particles.
Microfluidic cantilever detects bacteria and measures their susceptibility to antibiotics in small confined volumes Download PDF
Nanomechanical identification of liquid reagents in a microfluidic channel Download PDF
Thermomechanical responses of microfluidic cantilever capture DNA melting and properties of DNA premelting states using picoliters of DNA solution Download PDF
Online measurement of mass density and viscosity of pL fluid samples with suspended microchannel resonator Download PDF